Hlau phiajCov ntsiab lus ntawm sputtering
Lub hom phiaj, nws tsuas yog siv cov khoom siv hluav taws xob los yog lub zog loj laser foob pob rau sputtering txheej. Thaum kawg, cov khoom saum npoo tau muab tso rau ntawm qhov chaw ntawm lub substrate tom qab sputtered tawm raws li atomic pawg los yog ions, mus los ntawm ib tug txheej txheem ntawm films, thiab ua ib tug nyias zaj duab xis.
Sputtering txheej tuaj nyob rau hauv ntau yam ntawm ntau yam. Lawv feem ntau evaporation txheej Cov sputtering tus nqi yuav yog ib qho ntawm cov tsis tseem ceeb, uas yog qhov sib txawv.Lub laser sputtering txheej pld nyob rau hauv lub sputtering txheej yog yooj yim kom cov muaj pes tsawg leeg tsis zoo, tab sis lub thickness uniformity ntawm lub atomic scale yog kuj tsis zoo (vim. nws yog pulse sputtering) thiab kev tswj ntawm cov siv lead ua orientation (sab ntug) kev loj hlob yog feem ntau.
Qhov degree ntawm lattice sib piv ntawm cov substrate thiab cov khoom siv lub hom phiaj, txheej txheej ib puag ncig (tsawg-pressure gas cua), qhov kub thiab txias substrate, lub zog laser, mem tes zaus, thiab lub sij hawm sputtering yog qhov tseem ceeb hauv pld, piv txwv li. . Qhov zoo tshaj plaws tsis xav tau rau ntau yam substrates thiab sputtering cov ntaub ntawv. Lawv txawv, raws li kev sim. Lub peev xwm ntawm cov cuab yeej txheej los tswj qhov kub thiab txias, xyuas kom lub tshuab nqus tsev zoo, thiab tswj lub tshuab nqus tsev huv yog peb yam tseem ceeb uas txiav txim siab nws qhov zoo.
