Lub sij hawm "sputtering target" piav qhia txog qhov chaw sputtering uas yog sputtered thiab tso rau ntawm ib lub substrate los ntawm magnetron sputtering, multi-arc ion plating, los yog lwm yam khoom siv txheej txheej raws li cov txheej txheem tsim nyog los tsim cov yeeb yaj kiab nyias nyias. siv nyob rau hauv ntau yam kev lag luam, nrog rau cov hnub ci hlwb, cov vaj huam sib luag tiaj tus, cov khoom siv hluav taws xob, cov khoom siv hluav taws xob, cov cuab yeej siv, iav, thiab cov ntawv siv kho kom zoo nkauj. Hauv ntau qhov chaw, cov ntaub ntawv sib txawv yog xav tau.
Teeb tsa lub hom phiaj hlawv
Raws li tus txheej txheem, kev npaj ntawm sputtering lub hom phiaj cov ntaub ntawv yuav muab faib ua ob pawg: hmoov metallurgy thiab molten casting. Cov xwm txheej nyob rau hauv uas cov khoom yog rhuab thaum lub sij hawm kho cua sov txheej txheem raws li zoo raws li cov txheej txheem tom ntej yuav tsum tau ua tib zoo tswj ntxiv rau lub purity, ceev, grain loj, thiab siv lead ua orientation ntawm cov khoom. tswj.
1.Metalworking nrog hmoov
Txhawm rau kom ua tiav cov hom phiaj siv cov hmoov hlau metallurgy, nws yog ib qho tseem ceeb rau: (1) xaiv high-purity thiab ultra-fine hmoov ua raw khoom; (2) xaiv ib qho kev tsim thiab sintering tshuab uas tuaj yeem ua tiav ceev ceev kom ntseeg tau tias qhov porosity tsawg ntawm lub hom phiaj thiab tswj cov qoob loo loj; thiab (3) nruj me ntsis saib xyuas cov kev taw qhia ntawm impurity ntsiab.
2. Lub melting casting mus kom ze
Ib qho ntawm cov txheej txheem tseem ceeb rau kev tsim cov hom phiaj sputtering yog cov txheej txheem melting casting.Lub ingot smelting thiab casting yog feem ntau ua nyob rau hauv lub tshuab nqus tsev los yog ib tug tiv thaiv cua kom paub tseeb tias cov impurity ntsiab ntsiab lus yog tsawg raws li feasible.Txawm li cas los xij, ib qho nyiaj ntawm porosity hauv. lub moj khaum cov ntaub ntawv yog unavoidable thaum lub sij hawm casting txheej txheem. Lub sputtered zaj duab xis zoo yuav raug cuam tshuam los ntawm cov pores no vim tias lawv yuav ua rau cov khoom tawg tawg thaum lub sijhawm txheej txheem sputtering.Yuav kom txo nws cov permeability, ntxiv thermal ua thiab cov txheej txheem kho cua sov yog xav tau.
